A Brilliant Idea behind Every Product.
A Brilliant Idea behind Every Product.
More precision, less energy – a ceramic ring revolutionizes wafer coating
What began as an idea became a technological innovation: Together with Plasway Technologies, Alumina Systems developed a ceramic gas distribution ring that not only operates corrosion-free, but also makes processes faster, more consistent, and more energy-efficient.
From showerhead to high-performance ceramic: A new standard in semiconductor technology
A partnership with impact: How a vision became an award-winning component. In 2016, Stephan Wege, Managing Director of Plasway Technologies GmbH, approached Alumina Systems with a clear idea: to develop a new, durable, and multifunctional component for the latest generation of ALD (atomic layer deposition) systems for the semiconductor industry. Conventional systems with metallic “showerheads” are not only susceptible to corrosion, but they can only be used for coating, not etching. In addition, the coating process takes place at significantly higher temperatures and, in direct comparison, is slower and more uneven, requiring higher process gas and energy requirements.
In close development collaboration, a completely redesigned gas distribution ring made of aluminum oxide ceramic was created – a breakthrough for the industry.
High-tech made of ceramic: precise, robust, and modularly expandable
The first prototype was manufactured in 2017: a 380 mm ring, manufactured using the slip casting process, with brazed-in optimized 3D-printed ceramic nozzles. Two separate gas feeds enable the parallel use of different process gases – with even distribution and full corrosion resistance.
Since then, the technology has been consistently developed further:
The advantages at a glance