Alumina Systems GmbH, together with Plasway, presented itself at this year’s SEMICON with a modern and technically focused exhibition stand. A particular eye-catcher was the demonstrator of the Fast Atomic Layer Processing (FALP) system. The heart of the system is a ceramic gas distribution ring created using 3D printing. This FALP system represents the next generation of coating systems for semiconductor manufacturing.
The ceramic gas distribution ring is the result of close collaboration between Plasway and Alumina Systems. It is a technological milestone. The first version of this ring was awarded “Product of the Year” by the trade journal Ceramic Applications at the international Ceramitec trade fair in 2018. At SEMICON, visitors were able to experience the fourth generation of this component live, witness its performance firsthand, and learn about the advantages of this innovative combination of high-performance ceramics and coating technology.
The trade visitors showed great interest: numerous discussions revolved around process optimization, material technologies, and new application possibilities. For Alumina Systems, the trade fair was a valuable exchange with decision-makers and developers in the international semiconductor industry – and a strong signal for future projects.
